The H2O, C2H5OH, CO, CH4, NO and SO2 cross sensitivity to NO2 gas, as well as the long term stability of the electrical response of WO3 thin films have been evaluated and discussed in the light of different preparation conditions and working temperatures. Thin films have been obtained by evaporating high purity WO3 powder at 5 x 10(-4) Pa on sapphire substrates provided with Pt interdigital sputtered electrodes and annealed at 500 degrees C for 6, 12 and 24 h. The film morphology, crystalline phase and chemical composition have been characterised through AFM, glancing angle XRD and XPS. The as-deposited film is amorphous with WO3 stoichiometry on the surface, after annealing at 500 degrees C the films are well crystallised but with preferential orientation of WO3 along the (200) plane, The increasing of the annealing time shows a positive effect on the crystallite and grain size of the film, while the mean roughness and surface area difference slightly decrease. The binding energies of the annealed films are close to that of WO3 and small downshifts from the characteristic binding energy of W 4f(7/2) reflects the formation of oxygen vacancies on the longer time annealed films. All the films show the highest sensitivity to NO2 gas (0.7-5 ppm concentration range), at 250 degrees C working temperature. At this temperature and 1.7 ppm NO2 the calculated sensitivities yield S = 12, S = 43 and S = 45 for 6, 12 and 24 h annealed films, respectively. No cross sensitivity has been found by exposing the WO3 films to CO and CH4. Negligible H2O cross to NO2 has resulted for the 24 h annealed film in the 40-80% relative humidity range, as well as to 300 ppm SO2 and 10 ppm NO. Only 1000 ppm C2H5OH has resulted in a significant cross to the NO2 measure. The increase in the annealing time had positive effects on the sensitivity, cross sensitivity and long term stability properties. The 45-fold increase in the resistance of the 24 h annealed on exposure to 1.7 ppm of NO2, as well as the good long term stability properties of its electrical response, suggest the possibility of utilising the sensor for air-quality monitoring.

Cross-Sensitivity and stability of NO2 Sensors from WO3 Thin Film

CANTALINI, Carlo;FACCIO, Marco;LOZZI, Luca;PASSACANTANDO, MAURIZIO
1996

Abstract

The H2O, C2H5OH, CO, CH4, NO and SO2 cross sensitivity to NO2 gas, as well as the long term stability of the electrical response of WO3 thin films have been evaluated and discussed in the light of different preparation conditions and working temperatures. Thin films have been obtained by evaporating high purity WO3 powder at 5 x 10(-4) Pa on sapphire substrates provided with Pt interdigital sputtered electrodes and annealed at 500 degrees C for 6, 12 and 24 h. The film morphology, crystalline phase and chemical composition have been characterised through AFM, glancing angle XRD and XPS. The as-deposited film is amorphous with WO3 stoichiometry on the surface, after annealing at 500 degrees C the films are well crystallised but with preferential orientation of WO3 along the (200) plane, The increasing of the annealing time shows a positive effect on the crystallite and grain size of the film, while the mean roughness and surface area difference slightly decrease. The binding energies of the annealed films are close to that of WO3 and small downshifts from the characteristic binding energy of W 4f(7/2) reflects the formation of oxygen vacancies on the longer time annealed films. All the films show the highest sensitivity to NO2 gas (0.7-5 ppm concentration range), at 250 degrees C working temperature. At this temperature and 1.7 ppm NO2 the calculated sensitivities yield S = 12, S = 43 and S = 45 for 6, 12 and 24 h annealed films, respectively. No cross sensitivity has been found by exposing the WO3 films to CO and CH4. Negligible H2O cross to NO2 has resulted for the 24 h annealed film in the 40-80% relative humidity range, as well as to 300 ppm SO2 and 10 ppm NO. Only 1000 ppm C2H5OH has resulted in a significant cross to the NO2 measure. The increase in the annealing time had positive effects on the sensitivity, cross sensitivity and long term stability properties. The 45-fold increase in the resistance of the 24 h annealed on exposure to 1.7 ppm of NO2, as well as the good long term stability properties of its electrical response, suggest the possibility of utilising the sensor for air-quality monitoring.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11697/11559
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