Niobium microelectrodes for submicron particle confinement

By the superposition of niobium, titanium and gold layers have been fabricated electrodes for submicron particles confinement by dielectrophoresis forces. Electron beam lithography allowed us to define the critical geometries of the electrodes in the submicron range. The niobium layer improves also the mechanical strength of the electrodes and their robustness against the galvanic corrosion making them suitable for the confinement of particles and viruses immersed in a physiological solution.