A review of the existing and emerging technologies for wastewaters containing tetramethyl ammonium hydroxide (TMAH) and waste management systems in micro-chip microelectronic industries

The present work aims to describe and review the available technologies and the recent advancements in treating industrial wastewater containing tetramethylammonium hydroxide (TMAH). It is a quaternary ammonium salt and widely used in the microelectronics industry; this kind of company produces large quantities of wastewater containing TMAH. The exhausted solutions must be treated appropriately since TMAH is corrosive, toxic to human health, and ecotoxic. Regarding the concentration at discharge, currently there are no European regulations. Still, it has been indicated that the substance has a negative influence on the oxygen balance and cause eutrophication, and fall into the relevant categories. In the first part of the work, the available technologies and the recent advancements for the treatment of TMAH contained in industrial wastewater are reviewed. Separation methods as such adsorption, ion exchange, membrane processes, and destruction technologies classified as advanced oxidation processes and biological processes have been considered. In the second part of the manuscript, industrial patented wastewater treatments have been described. Biological processes are those more used, being more economically feasible, require very long times not always sustainable.