Nitrogen-doped amorphous hydrogenated hard carbon films were deposited by r.f. glow discharge from methane-nitrogen mixtures onto silicon substrates. The elastic properties of films obtained for different N-2 partial pressures were investigated by Brillouin light scattering, while Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity were exploited to study their structural and vibrational properties. Addition of a low percentage of nitrogen in the films induces marked modifications of the microscopic film structure, which induces a clear decrease of the elastic constants. (C) 2001 Elsevier Science B.V. All rights reserved. RI Valentini, Luca/D-5238-2011; Kenny, Jose/F-9372-2010
Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films
LOZZI, Luca;SANTUCCI, Sandro
2001-01-01
Abstract
Nitrogen-doped amorphous hydrogenated hard carbon films were deposited by r.f. glow discharge from methane-nitrogen mixtures onto silicon substrates. The elastic properties of films obtained for different N-2 partial pressures were investigated by Brillouin light scattering, while Raman spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectivity were exploited to study their structural and vibrational properties. Addition of a low percentage of nitrogen in the films induces marked modifications of the microscopic film structure, which induces a clear decrease of the elastic constants. (C) 2001 Elsevier Science B.V. All rights reserved. RI Valentini, Luca/D-5238-2011; Kenny, Jose/F-9372-2010Pubblicazioni consigliate
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