Scanning Auger Microscopy has been applied to study two typical problems in microelectronic features: depth profile analysis and defects. We have performed Auger depth profiles with and without the sample rotation during the sputtering and we have compared the results in terms of interface width and uniformity of the sputtered surface. Atomic Force Microscopy has been used to characterise the surface morphology and its results have been correlated to Auger map data. Microelectronics structures with a size of about 400 nm have been studied by means of Auger high resolution maps before and after electrical tests, in order to determine the effects of the tests opt their structure.
Scanning Auger microscopy studies of microelectronic features
LOZZI, Luca;
1998-01-01
Abstract
Scanning Auger Microscopy has been applied to study two typical problems in microelectronic features: depth profile analysis and defects. We have performed Auger depth profiles with and without the sample rotation during the sputtering and we have compared the results in terms of interface width and uniformity of the sputtered surface. Atomic Force Microscopy has been used to characterise the surface morphology and its results have been correlated to Auger map data. Microelectronics structures with a size of about 400 nm have been studied by means of Auger high resolution maps before and after electrical tests, in order to determine the effects of the tests opt their structure.Pubblicazioni consigliate
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