The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices. RI Ippolito, Samuel/B-8539-2008; Sberveglieri, Giorgio/A-5030-2010; kalantar-zadeh, Kourosh/C-2439-2009
Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC
PASSACANTANDO, MAURIZIO;CANTALINI, Carlo;
2004-01-01
Abstract
The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices. RI Ippolito, Samuel/B-8539-2008; Sberveglieri, Giorgio/A-5030-2010; kalantar-zadeh, Kourosh/C-2439-2009File in questo prodotto:
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